Thickness Control by Ion Beam Milling in Acoustic
Thickness Control by Ion Beam Milling in Acoustic Resonator Devices Sergey Mishin AMSystems, Inc. Goleta, CA, USA Yury Oshmyansky and Frank Bi Avago Technologies Fort Collins, CO,USA AbstractIn this paper, practical aspects of production worthy methods for film uniformity adjustment (trimming) used in manufacturing of Film Bulk Acoustic Resonator (FBAR) filters